TY - JOUR
KW - Ferroelectric materials
KW - Ferroelectric capacitors
KW - Capacitors
KW - Lead zirconate titanate (PZT)
KW - Ferroelectric property
KW - Chemical compositions
KW - Damaged layers
KW - Dielectric layer
KW - Gallium impurity
KW - Ion damage
KW - Ion dose
KW - Sub-100 nm
KW - Radiation damage
KW - Focused ion beams
AU - A Stanishevsky
AU - B Nagaraj
AU - J Melngailis
AU - Ramamoorthy Ramesh
AU - L Khriachtchev
AU - E McDaniel
AB - We studied the effect of ion damage on the properties of 50 keV Ga + focused ion beam fabricated lead-zirconate-titanate capacitors as a function of the ion dose. We observed significant modification in the chemical composition of the damaged layer due to loss of lead and oxygen, and gallium impurity accumulation. The 5-10 nm thick damaged layer becomes dielectric after annealing and does not recover its ferroelectric properties. This dielectric layer substantially reduces the actual volume of the ferroelectric material in sub-100 nm structures, and can affect their performance. © 2002 American Institute of Physics.
BT - Journal of Applied Physics
DO - 10.1063/1.1489069
LA - eng
M1 - 6
N1 - cited By 55
N2 - We studied the effect of ion damage on the properties of 50 keV Ga + focused ion beam fabricated lead-zirconate-titanate capacitors as a function of the ion dose. We observed significant modification in the chemical composition of the damaged layer due to loss of lead and oxygen, and gallium impurity accumulation. The 5-10 nm thick damaged layer becomes dielectric after annealing and does not recover its ferroelectric properties. This dielectric layer substantially reduces the actual volume of the ferroelectric material in sub-100 nm structures, and can affect their performance. © 2002 American Institute of Physics.
PY - 2002
SP - 3275
EP - 3278
T2 - Journal of Applied Physics
TI - Radiation damage and its recovery in focused ion beam fabricated ferroelectric capacitors
VL - 92
SN - 00218979
ER -