TY - JOUR
KW - Thin films
KW - Nanostructured materials
KW - Phase diagrams
KW - Ferroelectric materials
KW - Epitaxial growth
KW - Piezoelectricity
KW - Lead compounds
KW - Thermodynamics
KW - Capacitors
KW - Magnetic field effects
KW - Microscopic examination
KW - Scanning force microscopy (SFM)
AU - V Nagarajan
AU - A Stanishevsky
AU - L Chen
AU - T Zhao
AU - B.-T Liu
AU - J Melngailis
AU - A.L Roytburd
AU - Ramamoorthy Ramesh
AU - J Finder
AU - Z Yu
AU - R Droopad
AU - K Eisenbeiser
AB - The measurement of out-of-plane piezoelectric response of submicron capacitors fabricated from epitaxial lead zirconate titanate thin films, using piezoresponse scanning force microscopy was reported. It was found that there was a good agreement between the experimentally measured values of d33 for clamped and submicron capacitors and the predictions from thermodynamic theory. The results showed that for submicron capacitors in compositions closer to morphotropic boundary, the field-dependent piezoresponse was different from that predicted by the theoritical calculations.
BT - Applied Physics Letters
DO - 10.1063/1.1516857
LA - eng
M1 - 22
N1 - cited By 92
N2 - The measurement of out-of-plane piezoelectric response of submicron capacitors fabricated from epitaxial lead zirconate titanate thin films, using piezoresponse scanning force microscopy was reported. It was found that there was a good agreement between the experimentally measured values of d33 for clamped and submicron capacitors and the predictions from thermodynamic theory. The results showed that for submicron capacitors in compositions closer to morphotropic boundary, the field-dependent piezoresponse was different from that predicted by the theoritical calculations.
PY - 2002
SP - 4215
EP - 4217
T2 - Applied Physics Letters
TI - Realizing intrinsic piezoresponse in epitaxial submicron lead zirconate titanate capacitors on Si
VL - 81
SN - 00036951
ER -