TY - CPAPER KW - Thin films KW - Nanostructured materials KW - Hysteresis KW - Etching KW - Ferroelectric materials KW - Parameter estimation KW - Lead compounds KW - Wetting KW - Pore size KW - Electrostatic force microscopy KW - Nanorods KW - Precursors KW - Tubes (components) AU - Y Luo AU - I Szafraniak AU - V Nagarajan AU - R.B Wehrspohn AU - M Steinhart AU - J.H Wendorff AU - N.D Zakharov AU - Ramamoorthy Ramesh AU - M Alexe AU - LaFan D.A AU - Ayon A.A AU - Madou M.J AU - McNie M.E AB -

Wetting of the pore walls of porous templates is a simple and convenient method to prepare nanoshell tubes. Wafer-scale fabrication of ferroelectric lead zirconate titanate and barium titanate nanoshell tubes was accomplished by wetting porous silicon templates with polymeric precursors. The ferro- and piezoelectric properties of an individual ferroelectric nanoshell tube either of PZT or of BaTiO3 were electrically characterized by measuring the local piezoelectric hysteresis. A sharp switching at the coercive voltage of about 2 V was shown from the hysteresis loop. The corresponding effective remnant piezoelectric coefficient is about 90 pm/V. We have also prepared highly ordered arrays of free-standing ferroelectric nanoshell tubes obtained by partial etching of the silicon template. Such materials might be used as building blocks of miniaturized devices and could have a significant impact in the field of nano-electromechanical systems.

BT - Proceedings of the Materials Research Society Symposium - LA - eng N1 -

cited By 3

N2 -

Wetting of the pore walls of porous templates is a simple and convenient method to prepare nanoshell tubes. Wafer-scale fabrication of ferroelectric lead zirconate titanate and barium titanate nanoshell tubes was accomplished by wetting porous silicon templates with polymeric precursors. The ferro- and piezoelectric properties of an individual ferroelectric nanoshell tube either of PZT or of BaTiO3 were electrically characterized by measuring the local piezoelectric hysteresis. A sharp switching at the coercive voltage of about 2 V was shown from the hysteresis loop. The corresponding effective remnant piezoelectric coefficient is about 90 pm/V. We have also prepared highly ordered arrays of free-standing ferroelectric nanoshell tubes obtained by partial etching of the silicon template. Such materials might be used as building blocks of miniaturized devices and could have a significant impact in the field of nano-electromechanical systems.

PY - 2003 SP - 415 EP - 420 T2 - Proceedings of the Materials Research Society Symposium - T3 - Materials Research Society Symposium - TI - Ferroelectric lead zirconate titanate and barium titanate nanoshell tubes VL - 782 SN - 02729172 ER -