TY - JOUR KW - Microstructure KW - Thin films KW - Pulsed laser deposition KW - Transmission electron microscopy KW - Perovskite KW - Ion beams KW - Lanthanum compounds KW - Epitaxial growth KW - Single crystals KW - X-ray Diffraction KW - Dislocations (crystals) KW - Barium titanate KW - Coalescence KW - Metallic films KW - Shear stress KW - Ion-beam milling KW - Semiconductor films KW - Threading dislocations AU - I.B Misirlioglu AU - A.L Vasiliev AU - M Aindow AU - S.P Alpay AU - Ramamoorthy Ramesh AB - The epitaxial growth of (Ba,Sr)TiO3 (BST) films on (001) LaAlO3 by pulsed laser deposition and dislocation structures of the films were investigated. The BST films were deposited by PLD from a sintered BST target using growth conditions that results in high quality epitaxial films. The result show that the treading dislocations are not generated as the result of half-loop climb from the deposit surface. It was found that the dislocation were formed when misfit dislocations are forced away from the interface during island coalescence. BT - Applied Physics Letters DO - 10.1063/1.1664035 LA - eng M1 - 10 N1 - cited By 31 N2 - The epitaxial growth of (Ba,Sr)TiO3 (BST) films on (001) LaAlO3 by pulsed laser deposition and dislocation structures of the films were investigated. The BST films were deposited by PLD from a sintered BST target using growth conditions that results in high quality epitaxial films. The result show that the treading dislocations are not generated as the result of half-loop climb from the deposit surface. It was found that the dislocation were formed when misfit dislocations are forced away from the interface during island coalescence. PB - American Institute of Physics Inc. PY - 2004 SP - 1742 EP - 1744 T2 - Applied Physics Letters TI - Threading dislocation generation in epitaxial (Ba,Sr)TiO3 films grown on (001) LaAlO3 by pulsed laser deposition VL - 84 SN - 00036951 ER -