TY - JOUR KW - Electrodes KW - Scanning electron microscopy KW - Nanostructured materials KW - Elasticity KW - Computer simulation KW - Single crystals KW - Strontium compounds KW - Heterojunctions KW - Ferroelectric thin films KW - Capacitors KW - Semiconducting lead compounds KW - Piezoresponse KW - Finite element method KW - Epitaxial heterostructures KW - Nanostructured ferroelectric films KW - Mathematical models AU - J.-H Li AU - L Chen AU - V Nagarajan AU - Ramamoorthy Ramesh AU - A.L Roytburd AB - The converse piezoresponse measured by the surface displacement of ferroelectric islands, with lateral size changing from a nanoscale to a continuous film was modeled by using three-dimensional finite element method. It was shown that the piezodeformation of the islands results in a local deformation of a substrate in the vicinity of island. The piezoresponse of different size island capacitors with PbZr 0.5Ti 0.5O 3/SrTiO 3/Si and PbZr 0.2Ti 0.8O 3/SrTiO 3 heterostructures was also calculated. The patterning thin ferroelectric films into discrete islands was an effective way to release the constraint imposed by a substrate. BT - Applied Physics Letters DO - 10.1063/1.1695641 LA - eng M1 - 14 N1 - cited By 56 N2 - The converse piezoresponse measured by the surface displacement of ferroelectric islands, with lateral size changing from a nanoscale to a continuous film was modeled by using three-dimensional finite element method. It was shown that the piezodeformation of the islands results in a local deformation of a substrate in the vicinity of island. The piezoresponse of different size island capacitors with PbZr 0.5Ti 0.5O 3/SrTiO 3/Si and PbZr 0.2Ti 0.8O 3/SrTiO 3 heterostructures was also calculated. The patterning thin ferroelectric films into discrete islands was an effective way to release the constraint imposed by a substrate. PY - 2004 SP - 2626 EP - 2628 T2 - Applied Physics Letters TI - Finite element modeling of piezoresponse in nanostructured ferroelectric films VL - 84 SN - 00036951 ER -