TY - JOUR
KW - Sputtering
KW - Electric potential
KW - Hysteresis
KW - Atomic force microscopy
KW - Polarization
KW - Ferroelectric devices
KW - Ferroelectric capacitors
KW - Ferroelectric thin films
KW - Capacitors
KW - Resistors
KW - Electric conductivity
KW - Polycrystalline materials
KW - Noise levels
KW - Polarization hysteresis
KW - Switchable pulse polarization
KW - Data reduction
KW - Extrapolation
KW - Reactive ion etching
AU - S Prasertchoung
AU - V Nagarajan
AU - Z Ma
AU - Ramamoorthy Ramesh
AU - J.S Cross
AU - M Tsukada
AB - The measurement of switchable pulse polarization of micron and submicron ferroelectric capacitors was discussed, using pulse switching and atomic force microscope (AFM). The measurement setup for pulsed probing to measure the switchable polarization of a submicron capacitor was a combination of a pulse generator, an AFM, a shunt resistor, and a digital sampling oscilloscope. The switchable polarization of discrete polycrystalline Pb(ZrTi)O 3 capacitors were obtained using fast square pulses with rise time on the order of tens of nanaoseconds. The results show that switchable polarization is independent of the pulse width within experimental error.
BT - Applied Physics Letters
DO - 10.1063/1.1707221
LA - eng
M1 - 16
N1 - cited By 13
N2 - The measurement of switchable pulse polarization of micron and submicron ferroelectric capacitors was discussed, using pulse switching and atomic force microscope (AFM). The measurement setup for pulsed probing to measure the switchable polarization of a submicron capacitor was a combination of a pulse generator, an AFM, a shunt resistor, and a digital sampling oscilloscope. The switchable polarization of discrete polycrystalline Pb(ZrTi)O 3 capacitors were obtained using fast square pulses with rise time on the order of tens of nanaoseconds. The results show that switchable polarization is independent of the pulse width within experimental error.
PY - 2004
SP - 3130
EP - 3132
T2 - Applied Physics Letters
TI - Polarization switching of submicron ferroelectric capacitors using an atomic force microscope
VL - 84
SN - 00036951
ER -