TY - JOUR
KW - Single crystals
KW - Piezoelectricity
KW - Ferroelectric thin films
KW - Electric field effects
KW - Metallorganic chemical vapor deposition
KW - Piezoelectric constants
KW - Vectors
KW - Elastic moduli
KW - Full width at half maximum (FWHM)
KW - Piezoresponse microscopy
KW - Substrate-clamped films
KW - Lithography
KW - Matrix algebra
AU - J Ouyang
AU - S.Y Yang
AU - L Chen
AU - Ramamoorthy Ramesh
AU - A.L Roytburd
AB - The general expressions for the effective piezoelectric constants for substrate-clamped films as function of film orientation were discussed. The piezoelectric constants of films with a tetragonal crystallographic structure were calculated for typical orientations. The piezoelectric constants were measured experimentally for single domain ferroelectric Pb(Zr 0.2Ti 0.8)O 3 thin films. The theoretical results were found to be in good agreement with the experimental observations.
BT - Applied Physics Letters
DO - 10.1063/1.1771463
LA - eng
M1 - 2
N1 - cited By 32
N2 - The general expressions for the effective piezoelectric constants for substrate-clamped films as function of film orientation were discussed. The piezoelectric constants of films with a tetragonal crystallographic structure were calculated for typical orientations. The piezoelectric constants were measured experimentally for single domain ferroelectric Pb(Zr 0.2Ti 0.8)O 3 thin films. The theoretical results were found to be in good agreement with the experimental observations.
PY - 2004
SP - 278
EP - 280
T2 - Applied Physics Letters
TI - Orientation dependence of the converse piezoelectric constants for epitaxial single domain ferroelectric films
VL - 85
SN - 00036951
ER -