TY - JOUR
KW - Thin films
KW - Pulsed laser deposition
KW - Molecular beam epitaxy
KW - Transmission electron microscopy
KW - Film growth
KW - Ferroelectric materials
KW - Bismuth compounds
KW - Permittivity
KW - Piezoelectricity
KW - Electron diffraction
KW - Actuators
KW - Piezoelectric materials
KW - Microelectromechanical devices
KW - Hysteresis loops
KW - X-ray diffraction analysis
KW - Piezoelectric coefficients
KW - Compressive stress
KW - Electromagnetic wave polarization
KW - Heteroepitaxial growth
KW - Pulsed remnant polarization
KW - Thermal stress
AU - J Wang
AU - H Zheng
AU - Z Ma
AU - S Prasertchoung
AU - M Wuttig
AU - R Droopad
AU - J Yu
AU - K Eisenbeiser
AU - Ramamoorthy Ramesh
AB - The growth of epitaxial BiFeO 3 (BFO) thin films on Si substrate using pulsed laser deposition with SrTiO 3 (STO) as a template layer and SrRuO 3 (SRO) as a bottom electrode was investigated. The structure of the film was investigated using x-ray diffraction and transmission electron microscopy. It was observed that the value of spontaneous polarization of the films was ∼45 μC/Cm 2. The results show that the 400-nm-thick films has a large piezoelectric coefficient of ∼120 pm/V, which is useful to applications in actuators and microelectromechanical (MEMS) devices.
BT - Applied Physics Letters
DO - 10.1063/1.1799234
LA - eng
M1 - 13
N1 - cited By 231
N2 - The growth of epitaxial BiFeO 3 (BFO) thin films on Si substrate using pulsed laser deposition with SrTiO 3 (STO) as a template layer and SrRuO 3 (SRO) as a bottom electrode was investigated. The structure of the film was investigated using x-ray diffraction and transmission electron microscopy. It was observed that the value of spontaneous polarization of the films was ∼45 μC/Cm 2. The results show that the 400-nm-thick films has a large piezoelectric coefficient of ∼120 pm/V, which is useful to applications in actuators and microelectromechanical (MEMS) devices.
PY - 2004
SP - 2574
EP - 2576
T2 - Applied Physics Letters
TI - Epitaxial BiFeO 3 thin films on Si
VL - 85
SN - 00036951
ER -