TY - CPAPER
KW - Sensors
KW - Silicon
KW - Lead compounds
KW - Ferroelectric films
KW - MEMS
KW - Piezoelectric materials
KW - Epitaxial films
KW - Si substrates
KW - Orientation dependence
KW - Piezoelectric constant
KW - Sensor devices
AU - J Ouyang
AU - Ramamoorthy Ramesh
AU - A.L Roytburd
AB - Following our previous work on the converse piezoelectric constant-d 33.fC in epitaxial ferroelectric films for MEMS actuator applications', the orientation dependence of the direct piezoelectric constants d33,fD, d31.fD and d 33,fD are generally formulated, which can help to predict and optimize the performance of piezoelectric MEMS sensor devices based on ferroelectric thin films. Numerical results are obtained and discussed for Pb(ZrxTi1-x)O3 thin films grow on Si substrates with various compositions and structures. © 2005 Materials Research Society.
BT - Proceedings of the Materials Research Society Symposium
LA - eng
N1 - cited By 0
N2 - Following our previous work on the converse piezoelectric constant-d 33.fC in epitaxial ferroelectric films for MEMS actuator applications', the orientation dependence of the direct piezoelectric constants d33,fD, d31.fD and d 33,fD are generally formulated, which can help to predict and optimize the performance of piezoelectric MEMS sensor devices based on ferroelectric thin films. Numerical results are obtained and discussed for Pb(ZrxTi1-x)O3 thin films grow on Si substrates with various compositions and structures. © 2005 Materials Research Society.
PY - 2005
SN - 1558998357; 9781558998353/02729172
SP - 125
EP - 130
T2 - Proceedings of the Materials Research Society Symposium
T3 - Materials Research Society Symposium
TI - Effective direct piezoelectric constants in epitaxial ferroelectric films as MEMS sensors
VL - 881
ER -