TY - JOUR
KW - Annealing
KW - Nanostructured materials
KW - Ion beams
KW - Crystallization
KW - Ferroelectric materials
KW - Synthesis (chemical)
KW - Comminution
KW - Hole carriers
KW - Interlayers
KW - Nanoastructures
KW - Templated surface
AU - V Nagarajan
AU - A Stanishevsky
AU - Ramamoorthy Ramesh
AB - In this paper we demonstrate a modified focused ion beam (FIB) milling approach integrated with self-alignment to synthesize ferroelectric nanostructures. Nanoscale holes ranging from 500 nm down to 100 nm in diameter are created on 'spun-on' amorphous TiO2 on Pt/TiO2/Si using FIB milling. It is found that spin-coating of PbZr0.4Ti 0.6O3 (PZT) sol-gel precursors on these templated surfaces followed by low-temperature (∼400 °C) annealing leads to a ferroelectric phase only within the holes. Piezoresponse force microscopy (PFM) was used to confirm that the crystallized phase within the holes were ferroelectric and switchable. The smallest lateral size shown to be ferroelectric is roughly 70-80 nm in diameter. Quantitative PFM of the nanoscale ferroelectric regions yielded a value of 17 pm V-1, in good agreement with previously published data on polycrystalline PZT. Additionally this method facilitates the integration of interlayer dielectrics or 'spun-on' glass during the synthesis without the need for additional lithography and processing.
BT - Nanotechnology
DO - 10.1088/0957-4484/17/1/058
LA - eng
M1 - 1
N1 - cited By 21
N2 - In this paper we demonstrate a modified focused ion beam (FIB) milling approach integrated with self-alignment to synthesize ferroelectric nanostructures. Nanoscale holes ranging from 500 nm down to 100 nm in diameter are created on 'spun-on' amorphous TiO2 on Pt/TiO2/Si using FIB milling. It is found that spin-coating of PbZr0.4Ti 0.6O3 (PZT) sol-gel precursors on these templated surfaces followed by low-temperature (∼400 °C) annealing leads to a ferroelectric phase only within the holes. Piezoresponse force microscopy (PFM) was used to confirm that the crystallized phase within the holes were ferroelectric and switchable. The smallest lateral size shown to be ferroelectric is roughly 70-80 nm in diameter. Quantitative PFM of the nanoscale ferroelectric regions yielded a value of 17 pm V-1, in good agreement with previously published data on polycrystalline PZT. Additionally this method facilitates the integration of interlayer dielectrics or 'spun-on' glass during the synthesis without the need for additional lithography and processing.
PY - 2006
SP - 338
EP - 343
T2 - Nanotechnology
TI - Ferroelectric nanostructures via a modified focused ion beam technique
VL - 17
SN - 09574484
ER -