TY - JOUR
KW - Thin films
KW - Electrochemistry
KW - Electrochemical electrodes
KW - Calcium compounds
KW - Piezoelectric materials
KW - Microelectromechanical devices
KW - Lead-free thin-film piezoelectrics
KW - Microelectromechanical systems
KW - Piezoelectric coefficient
AU - A.Z Simões
AU - M.A Ramírez
AU - A Ries
AU - J.A Varela
AU - E Longo
AU - Ramamoorthy Ramesh
AB - Ca Bi4 Ti4 O15 (CBTi144) thin films were evaluated for use as lead-free thin-film piezoelectrics in microelectromechanical systems. The films were grown by the polymeric precursor method on (100) PtTiSi O2 Si substrates. The ab -axis orientation of the ferroelectric film is considered to be associated with the preferred orientation of the Pt bottom electrode. The Pr and Ec were 14 μC cm2 and 64 kVcm, respectively, for a maximum applied field of 400 kVcm. The domain structure was investigated by piezoresponse force microscopy. The film has a piezoelectric coefficient, d33, equal to 60 pmV and a current density of 0.7 mA cm2. © 2006 American Institute of Physics.
BT - Applied Physics Letters
DO - 10.1063/1.2172071
LA - eng
M1 - 7
N1 - cited By 38
N2 - Ca Bi4 Ti4 O15 (CBTi144) thin films were evaluated for use as lead-free thin-film piezoelectrics in microelectromechanical systems. The films were grown by the polymeric precursor method on (100) PtTiSi O2 Si substrates. The ab -axis orientation of the ferroelectric film is considered to be associated with the preferred orientation of the Pt bottom electrode. The Pr and Ec were 14 μC cm2 and 64 kVcm, respectively, for a maximum applied field of 400 kVcm. The domain structure was investigated by piezoresponse force microscopy. The film has a piezoelectric coefficient, d33, equal to 60 pmV and a current density of 0.7 mA cm2. © 2006 American Institute of Physics.
PY - 2006
T2 - Applied Physics Letters
TI - Electromechanical properties of calcium bismuth titanate films: A potential candidate for lead-free thin-film piezoelectrics
VL - 88
SN - 00036951
ER -