TY - JOUR KW - Thin films KW - Substrates KW - Oxygen KW - Strontium KW - Thermoelectricity KW - Annealing conditions KW - Oxygen deficiency AU - C Yu AU - M.L Scullin AU - M Huijben AU - Ramamoorthy Ramesh AU - A Majumdar AB - We report oxygen reduction in bulk strontium titanate substrates when a thin film was deposited in an oxygen-deficient environment. The oxygen diffusion occurred at moderate temperatures and oxygen pressures, which were not enough to produce detectable oxygen vacancies without the film deposition. In order to identify the reduction, we used a series of different annealing conditions and various substrates and performed comparative studies regarding thermoelectric properties before and after removing the films. Our experimental results suggest that the measurements of material properties of thin films on SrTi O3 single crystal substrates need to be performed carefully due to its strong susceptibility to oxygen deficient conditions. © 2008 American Institute of Physics. BT - Applied Physics Letters DO - 10.1063/1.2890493 LA - eng M1 - 9 N1 - cited By 40 N2 - We report oxygen reduction in bulk strontium titanate substrates when a thin film was deposited in an oxygen-deficient environment. The oxygen diffusion occurred at moderate temperatures and oxygen pressures, which were not enough to produce detectable oxygen vacancies without the film deposition. In order to identify the reduction, we used a series of different annealing conditions and various substrates and performed comparative studies regarding thermoelectric properties before and after removing the films. Our experimental results suggest that the measurements of material properties of thin films on SrTi O3 single crystal substrates need to be performed carefully due to its strong susceptibility to oxygen deficient conditions. © 2008 American Institute of Physics. PY - 2008 T2 - Applied Physics Letters TI - The influence of oxygen deficiency on the thermoelectric properties of strontium titanates VL - 92 SN - 00036951 ER -