TY - CPAPER
KW - Sensors
KW - Energy conversion
KW - Energy harvesting
KW - Piezoelectricity
KW - Capacitance
KW - Capacitors
KW - MEMS
KW - Direct write
KW - Direct-write printing
KW - Electrochemical capacitor
KW - Low frequency
KW - Electric network synthesis
KW - Electric power transmission networks
KW - Electric power utilization
KW - Harvesting
KW - Microelectromechanical devices
KW - Piezoelectric transducers
KW - Printing
KW - Sensor nodes
KW - Telecommunication equipment
KW - Thick films
KW - Harvesters
AU - L.M Miller
AU - C.C Ho
AU - P.C Shafer
AU - P.K Wright
AU - J.W Evans
AU - Ramamoorthy Ramesh
AB - This work presents an integration approach towards manufacturing a MEMS piezoelectric vibration energy harvester and an electrochemical capacitor on the same substrate. Vibration energy harvesters have been fabricated to resonate at low frequencies, matching ambient vibrations found abundantly in buildings. For cost-effective resonance tuning, a direct write dispenser printer can be used to print additional mass at the tips of the beams, and is also used to deposit a capacitor in the open space surrounding the beam. The implementation of a power supply on a single platform is of great value especially for autonomous wireless sensors with long lifetime and small device volume requirements. © 2009 IEEE.
BT - 2009 IEEE Energy Conversion Congress and Exposition, ECCE 2009
DO - 10.1109/ECCE.2009.5316243
LA - eng
N1 - cited By 14
N2 - This work presents an integration approach towards manufacturing a MEMS piezoelectric vibration energy harvester and an electrochemical capacitor on the same substrate. Vibration energy harvesters have been fabricated to resonate at low frequencies, matching ambient vibrations found abundantly in buildings. For cost-effective resonance tuning, a direct write dispenser printer can be used to print additional mass at the tips of the beams, and is also used to deposit a capacitor in the open space surrounding the beam. The implementation of a power supply on a single platform is of great value especially for autonomous wireless sensors with long lifetime and small device volume requirements. © 2009 IEEE.
PY - 2009
SN - 9781424428939
SP - 2627
EP - 2634
T2 - 2009 IEEE Energy Conversion Congress and Exposition, ECCE 2009
T3 - 2009 IEEE Energy Conversion Congress and Exposition, ECCE 2009
TI - Integration of a low frequency, tunable MEMS piezoelectric energy harvester and a thick film micro capacitor as a power supply system for wireless sensor nodes
ER -