TY - JOUR KW - Thin films KW - Mass spectrometry KW - Perovskite KW - Film growth KW - Morphology KW - Epitaxial growth KW - Complex oxides KW - Surface treatment KW - Substrate surface KW - Time-of-flight mass spectroscopy KW - Basic solutions KW - Chemical sensitivity KW - Crystal surfaces KW - Lattice parameters KW - Perovskite type oxides KW - Pseudocubic KW - Scandates KW - Selective wet etching KW - Single termination KW - Spectroscopy measurements KW - Time of flight KW - Wet etching AU - J.E Kleibeuker AU - G Koster AU - W Siemons AU - D Dubbink AU - B Kuiper AU - J.L Blok AU - C.-H Yang AU - J Ravichandran AU - Ramamoorthy Ramesh AU - J.E Elshof AU - D.H.A Blank AU - G Rijnders AB - {The fabrication of well-defined, atomically sharp substrate surfaces over a wide range of lattice parameters is reported, which is crucial for atomically regulated epitaxial growth of complex oxide heterostructures. By applying a framework for controlled selective wet etching of complex oxides on the stable rare-earth scandates (REScO3) BT - Advanced Functional Materials DO - 10.1002/adfm.201000889 LA - eng M1 - 20 N1 - cited By 59 N2 - {The fabrication of well-defined, atomically sharp substrate surfaces over a wide range of lattice parameters is reported, which is crucial for atomically regulated epitaxial growth of complex oxide heterostructures. By applying a framework for controlled selective wet etching of complex oxides on the stable rare-earth scandates (REScO3) PY - 2010 SP - 3490 EP - 3496 T2 - Advanced Functional Materials TI - Atomically defined rare-earth scandate crystal surfaces VL - 20 SN - 1616301X ER -