TY - JOUR KW - Mass spectrometry KW - Heterostructures KW - Atomic force microscopy KW - Strontium alloys KW - Surface termination KW - Atomic layer KW - Thermal-annealing KW - SrTiO KW - Chemical etching KW - Flat terraces KW - Interface engineering KW - Ti-rich surface KW - Time-of-flight mass spectroscopy KW - Treatment process KW - Unit cells KW - Soil conservation AU - A Biswas AU - P.B Rossen AU - C.-H Yang AU - W Siemons AU - M.-H Jung AU - I.K Yang AU - Ramamoorthy Ramesh AU - Y.H Jeong AB - We have studied the surface termination of atomically flat SrTiO 3 surfaces treated by chemical etching and subsequent thermal annealing, for all commercially available orientations (001), (110), and (111). Atomic force microscopy confirms that our treatment processes produce unit cell steps with flat terrace structures. We have also determined the topmost atomic layer of SrTiO3 surfaces through time-of-flight mass spectroscopy. We found that all three orientations exhibit a Ti-rich surface. Our observation opens doors for interface engineering along the [110] and [111] directions in addition to a well known [100] case, which widens the range of functional heterostructures and interfaces. © 2011 American Institute of Physics. BT - Applied Physics Letters DO - 10.1063/1.3549860 LA - eng M1 - 5 N1 - cited By 82 N2 - We have studied the surface termination of atomically flat SrTiO 3 surfaces treated by chemical etching and subsequent thermal annealing, for all commercially available orientations (001), (110), and (111). Atomic force microscopy confirms that our treatment processes produce unit cell steps with flat terrace structures. We have also determined the topmost atomic layer of SrTiO3 surfaces through time-of-flight mass spectroscopy. We found that all three orientations exhibit a Ti-rich surface. Our observation opens doors for interface engineering along the [110] and [111] directions in addition to a well known [100] case, which widens the range of functional heterostructures and interfaces. © 2011 American Institute of Physics. PY - 2011 T2 - Applied Physics Letters TI - Universal Ti-rich termination of atomically flat SrTiO3 (001), (110), and (111) surfaces VL - 98 SN - 00036951 ER -