TY - JOUR KW - Integrated circuits KW - Ferroelectric materials KW - Ferroelectricity KW - Orders of magnitude KW - Negative capacitance KW - Ferroelectric devices KW - Ferroelectric capacitors KW - Capacitance KW - Capacitors KW - Drain current KW - MOSFET devices KW - Reconfigurable hardware KW - SPICE KW - Epitaxial ferroelectric KW - NC-FinFET KW - Self-consistent simulations KW - Sub-60 mV/decade KW - Transfer characteristics AU - A.I Khan AU - K Chatterjee AU - J.P Duarte AU - Z Lu AU - A Sachid AU - S Khandelwal AU - Ramamoorthy Ramesh AU - C Hu AU - S Salahuddin AB - We report subthreshold swings as low as 8.5 mV/decade over as high as eight orders of magnitude of drain current in short-channel negative capacitance FinFETs (NC-FinFETs) with gate length Lg=100 nm. NC-FinFETs are constructed by connecting a high-quality epitaxial bismuth ferrite (BiFeO3) ferroelectric capacitor to the gate terminal of both n-type and p-type FinFETs. We show that a self-consistent simulation scheme based on Berkeley SPICE Insulated-Gate-FET Model:Common Multi Gate model and Landau-Devonshire formalism could quantitatively match the experimental NC-FinFET transfer characteristics. This also allows a general procedure to extract the effective S-shaped ferroelectric charge-voltage characteristics that provides important insights into the device operation. © 2015 IEEE. BT - IEEE Electron Device Letters DO - 10.1109/LED.2015.2501319 LA - eng M1 - 1 N1 - cited By 106 N2 - We report subthreshold swings as low as 8.5 mV/decade over as high as eight orders of magnitude of drain current in short-channel negative capacitance FinFETs (NC-FinFETs) with gate length Lg=100 nm. NC-FinFETs are constructed by connecting a high-quality epitaxial bismuth ferrite (BiFeO3) ferroelectric capacitor to the gate terminal of both n-type and p-type FinFETs. We show that a self-consistent simulation scheme based on Berkeley SPICE Insulated-Gate-FET Model:Common Multi Gate model and Landau-Devonshire formalism could quantitatively match the experimental NC-FinFET transfer characteristics. This also allows a general procedure to extract the effective S-shaped ferroelectric charge-voltage characteristics that provides important insights into the device operation. © 2015 IEEE. PB - Institute of Electrical and Electronics Engineers Inc. PY - 2016 SP - 111 EP - 114 T2 - IEEE Electron Device Letters TI - Negative Capacitance in Short-Channel FinFETs Externally Connected to an Epitaxial Ferroelectric Capacitor VL - 37 SN - 07413106 ER -