TY - JOUR
KW - Temperature
KW - Transmission electron microscopy
KW - Film
KW - Crystal
KW - Oxide
KW - Silicon
KW - Room temperature
KW - Semiconductor
KW - Zircon
KW - Polarization
KW - Electronic equipment
KW - Article
KW - Piezoelectricity
KW - Crystal chemistry
KW - Physicochemical property
KW - Titanate
KW - Dielectric constant
KW - Field effect transistor
AU - S.R Bakaul
AU - C.R Serrao
AU - M Lee
AU - C.W Yeung
AU - A Sarker
AU - S.-L Hsu
AU - A.K Yadav
AU - L Dedon
AU - L You
AU - A.I Khan
AU - J.D Clarkson
AU - C Hu
AU - Ramamoorthy Ramesh
AU - S Salahuddin
AB - Single-crystalline thin films of complex oxides show a rich variety of functional properties such as ferroelectricity, piezoelectricity, ferro and antiferromagnetism and so on that have the potential for completely new electronic applications. Direct synthesis of such oxides on silicon remains challenging because of the fundamental crystal chemistry and mechanical incompatibility of dissimilar interfaces. Here we report integration of thin (down to one unit cell) single crystalline, complex oxide films onto silicon substrates, by epitaxial transfer at room temperature. In a field-effect transistor using a transferred lead zirconate titanate layer as the gate insulator, we demonstrate direct reversible control of the semiconductor channel charge with polarization state. These results represent the realization of long pursued but yet to be demonstrated single-crystal functional oxides on-demand on silicon.
BT - Nature Communications
DO - 10.1038/ncomms10547
LA - eng
N1 - cited By 48
N2 - Single-crystalline thin films of complex oxides show a rich variety of functional properties such as ferroelectricity, piezoelectricity, ferro and antiferromagnetism and so on that have the potential for completely new electronic applications. Direct synthesis of such oxides on silicon remains challenging because of the fundamental crystal chemistry and mechanical incompatibility of dissimilar interfaces. Here we report integration of thin (down to one unit cell) single crystalline, complex oxide films onto silicon substrates, by epitaxial transfer at room temperature. In a field-effect transistor using a transferred lead zirconate titanate layer as the gate insulator, we demonstrate direct reversible control of the semiconductor channel charge with polarization state. These results represent the realization of long pursued but yet to be demonstrated single-crystal functional oxides on-demand on silicon.
PB - Nature Publishing Group
PY - 2016
T2 - Nature Communications
TI - Single crystal functional oxides on silicon
VL - 7
SN - 20411723
ER -