TY - JOUR KW - Electric fields KW - Electric-field control KW - Random access storage KW - Controlled nanocrack KW - Nano-electromechanical KW - Nanoelectromechanical switches KW - Non-volatile memory KW - Non-volatile random access memory KW - Off-state leakage current KW - ON/OFF current ratio KW - Electric switches AU - Q Luo AU - Z Guo AU - H Huang AU - Q Zou AU - X Jiang AU - S Zhang AU - H Wang AU - M Song AU - B Zhang AU - H Chen AU - H Gu AU - G Han AU - X Yang AU - X Zou AU - K.-Y Wang AU - Z Liu AU - J Hong AU - Ramamoorthy Ramesh AU - L You AB - Nanoelectromechanical (NEM) switches could surmount the Boltzmann Tyranny in the current charge-carrier systems. However, thus far, practical implementations of the NEM systems have been hindered by the complicated fabrication processes of forming the extremely small air gap. Here, we realize a very simple NEM switch by exploiting a switchable nanocrack controlled by an electric field in a metallic alloy-ferroelectric heterostructure. The crack is formed in a controllable manner in terms of its initiation, location, and orientation through a bridge-like structure. The open and closed states of the crack are programmed under a cyclic electric field. In addition, an abrupt switching behavior with a nonvolatile high ON/OFF current ratio (>107) is measured owing to the near-zero OFF-state leakage current across the crack. This simple nanocrack switch presents a novel opportunity in the NEM systems, which can be used as a new nonvolatile random-access memory and logic. © 1980-2012 IEEE. BT - IEEE Electron Device Letters DO - 10.1109/LED.2019.2917924 LA - eng M1 - 7 N1 - cited By 1 N2 - Nanoelectromechanical (NEM) switches could surmount the Boltzmann Tyranny in the current charge-carrier systems. However, thus far, practical implementations of the NEM systems have been hindered by the complicated fabrication processes of forming the extremely small air gap. Here, we realize a very simple NEM switch by exploiting a switchable nanocrack controlled by an electric field in a metallic alloy-ferroelectric heterostructure. The crack is formed in a controllable manner in terms of its initiation, location, and orientation through a bridge-like structure. The open and closed states of the crack are programmed under a cyclic electric field. In addition, an abrupt switching behavior with a nonvolatile high ON/OFF current ratio (>107) is measured owing to the near-zero OFF-state leakage current across the crack. This simple nanocrack switch presents a novel opportunity in the NEM systems, which can be used as a new nonvolatile random-access memory and logic. © 1980-2012 IEEE. PB - Institute of Electrical and Electronics Engineers Inc. PY - 2019 SP - 1209 EP - 1212 T2 - IEEE Electron Device Letters TI - Nanoelectromechanical switches by controlled switchable cracking VL - 40 SN - 07413106 ER -