TY - JOUR
AU - Suhan Kim
AU - Gao Liu
AU - Andrew M Minor
BT - Microscopy Today
C3 - liu group
DA - 11/2009
LA - eng
M1 - 06
PY - 2009
SP - 20
EP - 23
T2 - Microscopy Today
TI - FIB Sample Preparation of Polymer Thin Films on Hard Substrates Using the Shadow-FIB method
VL - 17
ER -