TY - JOUR
KW - Efficiency
KW - Experimental
KW - Ablation
KW - Laser
KW - Laser ablation
KW - Laser ablation
KW - Ablation efficiency
KW - Plasma
KW - Femtosecond
KW - Nanosecond
KW - Laser-induced plasma
KW - Laser-induced plasma
KW - Nanosecond laser
KW - Silicon
KW - Expansion
AU - Xianzhong Zeng
AU - Xianglei Mao
AU - Ralph Greif
AU - Richard E Russo
AN - 154
BT - Applied Physics A: Materials science and processing
C2 - LBNL-55783
LA - eng
LB - Laser
N1 - <p>LBNL-55783 NOT IN FILE</p>
PY - 2004
SP - 237
EP - 241
T2 - Applied Physics A: Materials science and processing
TI - Experimental investigation of ablation efficiency and laser-induced plasma expansion during femtosecond and nanosecond laser ablation of silicon
VL - 80
ER -