TY - JOUR
KW - Temperature
KW - Measurement
KW - Film
KW - Films
KW - Thin
KW - Laser
KW - Excimer
KW - Excimer laser
KW - Semiconductor
KW - Excimer laser
AU - Xianfan Xu
AU - Costas P Grigoropoulos
AU - Richard E Russo
AN - 54
BT - Journal of Heat and Mass Transfer
LA - eng
LB - Laser
N1 - <p>NOT IN FILE</p>
PY - 1995
SP - 17
EP - 24
T2 - Journal of Heat and Mass Transfer
TI - Transient temperature measurement during pulsed excimer laser heating of thin semiconductor films
VL - 117
ER -