TY - JOUR KW - Temperature KW - Measurement KW - Film KW - Films KW - Laser KW - Excimer KW - Excimer laser KW - Silicon KW - Excimer laser KW - Interface KW - Polycrystalline AU - Xianfan Xu AU - Costas P Grigoropoulos AU - Richard E Russo AN - 46 BT - Appl.Phys.Lett. LA - eng LB - Laser N1 -
NOT IN FILE
PY - 1994 SP - 1745 EP - 1747 T2 - Appl.Phys.Lett. TI - Measurement of solid/liquid interface temperature during pulsed excimer laser malting of polycrystalline silicon films VL - 65 ER -