TY - JOUR
KW - Measurements
KW - Measurement
KW - Deflection
KW - Beam
KW - Beam deflection
KW - Probe
AU - Jonathan D Spear
AU - Richard E Russo
AN - 74
BT - Review of Scientific Instrumentation
C2 - LBNL-38660
LA - eng
LB - Laser
N1 - <p>LBNL-38660 NOT IN FILE</p>
PY - 1996
SP - 2481
EP - 2484
T2 - Review of Scientific Instrumentation
TI - Low noise position sensor for optical probe beam deflection measurements
VL - 67
ER -