TY - JOUR
KW - Deposition
KW - Pulse
KW - Thin films
KW - Film
KW - Films
KW - Thin
KW - Thin film
KW - Thin-film
KW - Thin films
KW - Laser
KW - Pulse laser
KW - Laser deposition
AU - Richard E Russo
AU - Samuel S Mao
AU - Dale L Perry
AN - 47
BT - Chemtech
LA - eng
LB - Laser
N1 - <p>NOT IN FILE</p>
PY - 1994
SP - 14
EP - 18
T2 - Chemtech
TI - Pulse laser deposition of thin films
VL - 24
ER -