Amorphous carbon films were deposited on glass by d.c. magnetron sputtering from a graphite target in mixtures of argon and hydrogen. Hydrogen flow and other deposition parameters affected the optical and mechanical properties of these films. Increasing hydrogen content caused the average visible transmittance to vary from 16% to 86% for 500-Å thick films. Maximum compressive stress and hardness occur between 0-1% hydrogen flow, resulting in rapid delamination. Low sputtering power moderately increases transmittance and hardness while relieving stress. Transparency is induced in both the high-hydrogen and low-power films by formation of sp3 C-C bonds. In the case of the hydrogenated films, however, a softer polymeric structure is formed.
BT - Journal of Materials Research C1 -Windows and Daylighting Group
C2 - LBL-28826 DA - 11/1990 DO - 10.1557/JMR.1990.2538 IS - 11 LA - eng M1 - 11 N2 -Amorphous carbon films were deposited on glass by d.c. magnetron sputtering from a graphite target in mixtures of argon and hydrogen. Hydrogen flow and other deposition parameters affected the optical and mechanical properties of these films. Increasing hydrogen content caused the average visible transmittance to vary from 16% to 86% for 500-Å thick films. Maximum compressive stress and hardness occur between 0-1% hydrogen flow, resulting in rapid delamination. Low sputtering power moderately increases transmittance and hardness while relieving stress. Transparency is induced in both the high-hydrogen and low-power films by formation of sp3 C-C bonds. In the case of the hydrogenated films, however, a softer polymeric structure is formed.
PY - 1990 SP - 2538 EP - 2542 T2 - Journal of Materials Research TI - Optical and Mechanical Properties of DC Sputtered Carbon Films VL - 5 ER -