Multiply charged titanium ions including Ti4+ were observed in high power impulse magnetron sputtering discharges. Mass/charge spectrometry was used to identify metal ion species. Quadruply charged titanium ions were identified by isotope-induced broadening at mass/charge 12. Due to their high potential energy, Ti4+ ions give a high yield of secondary electrons, which in turn are likely to be responsible for the generation of multiply charged states.
BT - Applied Physics Letters C1 -Windows and Daylighting Group
C2 - LBNL-680E DA - 08/2008 DO - 10.1063/1.2973179 IS - 7 LA - eng N2 -Multiply charged titanium ions including Ti4+ were observed in high power impulse magnetron sputtering discharges. Mass/charge spectrometry was used to identify metal ion species. Quadruply charged titanium ions were identified by isotope-induced broadening at mass/charge 12. Due to their high potential energy, Ti4+ ions give a high yield of secondary electrons, which in turn are likely to be responsible for the generation of multiply charged states.
PY - 2008 EP - 71504 T2 - Applied Physics Letters TI - Observation of Ti4+ ions in a high power impulse magnetron sputtering plasma VL - 93 ER -