The quasi-linear constricted plasma source is a downstream plasma source with ten linearly aligned discharge cells. Each cell operates on the basis of a constricted glow discharge. The plasma output can easily be monitored by the plasma-emitted light. The information is not only intuitive but can also be used to operate on-line feedback control of the plasma source which is important for large-area plasma processing of materials.
BT - IEEE Transactions on Plasma Science C1 -Windows and Daylighting Group
C2 - LBNL-42016 DA - 02/1999 IS - 1 LA - eng M1 - 1 N2 -The quasi-linear constricted plasma source is a downstream plasma source with ten linearly aligned discharge cells. Each cell operates on the basis of a constricted glow discharge. The plasma output can easily be monitored by the plasma-emitted light. The information is not only intuitive but can also be used to operate on-line feedback control of the plasma source which is important for large-area plasma processing of materials.
PY - 1999 SP - 82 EP - 83 T2 - IEEE Transactions on Plasma Science TI - Evaluation of the Plasma Distribution of a Quasi-Linear Constricted Plasma Source VL - 27 ER -