TY - JOUR KW - Arc plasma KW - Cathodic vacuum arc KW - Ion charge states KW - Macroparticle filter KW - Plasma transport AU - Eungsun Byon AU - Jong-Kuk Kim AU - Sik-Chol Kwon AU - André Anders AB -

The effect of ion mass and charge state on plasma transport through a 90 deg.-curved magnetic filter is experimentally investigated using a pulsed cathodic arc source. Graphite, copper, and tungsten were selected as test materials. The filter was a bent copper coil biased via the voltage drop across a low-ohm, selfbias resistor. Ion transport is accomplished via a guiding electric field, whose potential forms a trough shaped by the magnetic guiding field of the filter coil. Evaluation was done by measuring the filtered ion current and determination of the particle system coefficient, which can be defined as the ratio of filtered ion current, divided by the mean ion charge state, to the arc current. It was found that the ion current and particle system coefficient decreased as the mass-to-charge ratio of ions increased. This result can be qualitatively interpreted by a very simple model of ion transport that is based on compensation of the centrifugal force by the electric force associated with the guiding potential trough.

AN - 8051531 BT - IEEE Transactions on Plasma Science C1 -

Windows and Daylighting Group

C2 - LBNL-53728 DA - 04/2004 DO - 10.1109/TPS.2004.826363 IS - 2 LA - eng M1 - 2 N2 -

The effect of ion mass and charge state on plasma transport through a 90 deg.-curved magnetic filter is experimentally investigated using a pulsed cathodic arc source. Graphite, copper, and tungsten were selected as test materials. The filter was a bent copper coil biased via the voltage drop across a low-ohm, selfbias resistor. Ion transport is accomplished via a guiding electric field, whose potential forms a trough shaped by the magnetic guiding field of the filter coil. Evaluation was done by measuring the filtered ion current and determination of the particle system coefficient, which can be defined as the ratio of filtered ion current, divided by the mean ion charge state, to the arc current. It was found that the ion current and particle system coefficient decreased as the mass-to-charge ratio of ions increased. This result can be qualitatively interpreted by a very simple model of ion transport that is based on compensation of the centrifugal force by the electric force associated with the guiding potential trough.

PY - 2004 SP - 433 EP - 439 T2 - IEEE Transactions on Plasma Science TI - Effect of Ion Mass and Charge State on Transport Vacuum Arc Plasmas Through a Biased Magnetic Filter VL - 32 SN - 0093-3813 ER -