@article{34457, author = {Peter Dudenas and Adam Z Weber and Ahmet Kusoglu}, title = {Electric-field-intensity-modulated scattering as a thin-film depth probe}, abstract = {
Grazing-incidence X-ray scattering is a common technique to elucidate nanostructural information for thin-film samples, but depth-resolving this nanostructure is difficult using a single or few images. An in situ method to extract film thickness, the index of refraction and depth information using scattering images taken across a range of incident angles is presented here. The technique is described within the multilayer distorted-wave Born approximation and validated using two sets of polymer thin films. Angular divergence and energy resolution effects are considered, and implementation of the technique as a general beamline procedure is discussed. Electric-field-intensity-modulated scattering is a general technique applicable to myriad materials and enables the acquisition of depth-sensitive information in situ at any grazing-incidence-capable beamline.
}, year = {2020}, journal = {Journal of Applied Crystallography}, volume = {53}, pages = {1484 - 1492}, month = {11/2020}, doi = {10.1107/S160057672001304710.1107/S1600576720013047/ge5076sup1.pdf}, language = {eng}, }