@article{33823, author = {D.J Keeble and B Nielsen and A Krishnan and K.G Lynn and S Madhukar and Ramamoorthy Ramesh and C.F Young}, title = {Vacancy defects in (Pb, La)(Zr, Ti)O3 capacitors observed by positron annihilation}, abstract = {A study of vacancy-related defects in ferroelectric capacitors was performed using a variable energy positron beam (VEPB). Heterostructures of (Pb0.9La0.1)(Zr0.2Ti0.8)O 3 (PLZT) ferroelectric with La0.5Sr0.5CoO3 (LSCO) electrodes were deposited by pulsed laser deposition and the effects of oxygen deficiency studied using structures grown with 760 and 1×10-5Torr oxygen. The VEPB depth profile showed an increase in vacancy-related defects with increased oxygen nonstoichiometry. A study of LSCO and PLZT thin films was also performed. The formation of vacancy clusters in the LSCO top electrode, and VPb-VO defects in the PLZT layer, with increased oxygen deficiency is inferred. © 1998 American Institute of Physics.}, year = {1998}, journal = {Applied Physics Letters}, volume = {73}, number = {3}, pages = {318-320}, issn = {00036951}, doi = {10.1063/1.121820}, note = {cited By 45}, language = {eng}, }