@article{33789,
  author = {D.E Steinhauer and C.P Vlahacos and F.C Wellstood and S.M Anlage and C Canedy and Ramamoorthy Ramesh and A Stanishevsky and J Melngailis},
  title = {Imaging of microwave permittivity, tunability, and damage recover in (Ba, Sr)TiO3 thin films},
  abstract = {We describe the use of a near-field scanning microwave microscope to quantitatively image the dielectric permittivity and tunability of thin-film dielectric samples on a length scale of 1 μm. We demonstrate this technique with permittivity images and local hysteresis loops of a 370-nm-thick Ba0.6Sr0.4TiO3 thin film at 7.2 GHz. We also observe the role of annealing in the recovery of dielectric tunability in a damaged region of the thin film. We can measure changes in relative permittivity εr as small as 2 at εr = 500, and changes in dielectric tunability dεr/dV as small as 0.03 V-1. © 1999 American Institute of Physics.},
  year = {1999},
  journal = {Applied Physics Letters},
  volume = {75},
  number = {20},
  pages = {3180-3182},
  publisher = {American Institute of Physics Inc.},
  issn = {00036951},
  doi = {10.1063/1.125270},
  note = {cited By 73},
  language = {eng},
}