@article{33674, keywords = {microstructure, thin films, pulsed laser deposition, transmission electron microscopy, Perovskite, ion beams, lanthanum compounds, Epitaxial growth, Single crystals, X ray diffraction, Dislocations (crystals), Barium titanate, Coalescence, Metallic films, Shear stress, Ion-beam milling, Semiconductor films, Threading dislocations}, author = {I.B Misirlioglu and A.L Vasiliev and M Aindow and S.P Alpay and Ramamoorthy Ramesh}, title = {Threading dislocation generation in epitaxial (Ba,Sr)TiO3 films grown on (001) LaAlO3 by pulsed laser deposition}, abstract = {The epitaxial growth of (Ba,Sr)TiO3 (BST) films on (001) LaAlO3 by pulsed laser deposition and dislocation structures of the films were investigated. The BST films were deposited by PLD from a sintered BST target using growth conditions that results in high quality epitaxial films. The result show that the treading dislocations are not generated as the result of half-loop climb from the deposit surface. It was found that the dislocation were formed when misfit dislocations are forced away from the interface during island coalescence.}, year = {2004}, journal = {Applied Physics Letters}, volume = {84}, number = {10}, pages = {1742-1744}, publisher = {American Institute of Physics Inc.}, issn = {00036951}, doi = {10.1063/1.1664035}, note = {cited By 31}, language = {eng}, }