@article{33672, keywords = {Electrodes, Scanning electron microscopy, Nanostructured materials, Elasticity, Computer simulation, Single crystals, Strontium compounds, Heterojunctions, Ferroelectric thin films, Capacitors, Semiconducting lead compounds, Piezoresponse, Finite element method, Epitaxial heterostructures, Nanostructured ferroelectric films, Mathematical models}, author = {J.-H Li and L Chen and V Nagarajan and Ramamoorthy Ramesh and A.L Roytburd}, title = {Finite element modeling of piezoresponse in nanostructured ferroelectric films}, abstract = {The converse piezoresponse measured by the surface displacement of ferroelectric islands, with lateral size changing from a nanoscale to a continuous film was modeled by using three-dimensional finite element method. It was shown that the piezodeformation of the islands results in a local deformation of a substrate in the vicinity of island. The piezoresponse of different size island capacitors with PbZr 0.5Ti 0.5O 3/SrTiO 3/Si and PbZr 0.2Ti 0.8O 3/SrTiO 3 heterostructures was also calculated. The patterning thin ferroelectric films into discrete islands was an effective way to release the constraint imposed by a substrate.}, year = {2004}, journal = {Applied Physics Letters}, volume = {84}, number = {14}, pages = {2626-2628}, issn = {00036951}, doi = {10.1063/1.1695641}, note = {cited By 56}, language = {eng}, }