@article{33539,
  keywords = {pulsed laser deposition, electrical resistivity, lasers, Perovskite, substrates, laser deposition, film growth, Single crystals, Thin film devices, Strontium, Strontium compounds, Strontium alloys, strontium titanate, Secondary emission, Secondary ion mass spectrometry, electric conductivity, SrTiO, In-situ characterization, Back-gate, Crystal substrates, Functional oxides, Generic method, Secondary ion mass spectroscopy, Substrate resistance, Thermodynamic conditions, Thin film material, Mass spectrometers, Programmable logic controllers},
  author = {M.L Scullin and J Ravichandran and C Yu and M Huijben and J Seidel and A Majumdar and Ramamoorthy Ramesh},
  title = {Pulsed laser deposition-induced reduction of SrTiO3 crystals},
  abstract = {We report a generic method for fast and efficient reduction of strontium titanate (SrTiO3, STO) single crystals by pulsed laser deposition (PLD) of thin-films. The reduction was largely independent of the thin-film material deposited on the crystals. It is shown that thermodynamic conditions (450 °C, 10-7 torr, 10-60 min), which normally reduce STO (0 0 1) substrates to roughly 5 nm into a crystal substrate, can reduce the same crystals throughout their 500 μm thickness when coupled with the PLD. In situ characterization of the STO substrate resistance during thin-film growth is presented. This process opens up the possibility of employing STO substrates as a back-gate in functional oxide devices. © 2009 Acta Materialia Inc.},
  year = {2010},
  journal = {Acta Materialia},
  volume = {58},
  number = {2},
  pages = {457-463},
  issn = {13596454},
  doi = {10.1016/j.actamat.2009.09.024},
  note = {cited By 56},
  language = {eng},
}