@misc{31197, author = {Kramadhati Ravi V and Ravi S Prasher and Gregory M Chrysler}, title = {IC die with directly bonded liquid cooling device}, abstract = {

An apparatus includes an integrated circuit (IC) die having a substrate formed of a first semiconductor material and a cooling device form of a second semiconductor material. The cooling device is directly mounted to the substrate of the IC die.

}, year = {2006}, number = {7071552}, month = {07/2006}, url = {https://patents.google.com/patent/US7071552B2/en}, language = {eng}, }