@article{6644,
  keywords = {Pulsed laser deposition, Lithium, Solid electrolyte, Garnet, Lithium lanthanate zirconate},
  author = {Joong Sun Park and Lei Cheng and Vassilia Zorba and Apurva Mehta and Jordi Cabana and Guoying Chen and Marca M Doeff and Thomas J Richardson and Jung Hoon Park and Ji-Won Son and Wan-Shick Hong},
  title = {Effects of Crystallinity and Impurities on the Electrical Conductivity of Li-La-Zr-O Thin Films},
  abstract = {<p>We present a study of the fabrication of thin films from a Li<sub>7</sub>La<sub>3</sub>Zr<sub>2</sub>O<sub>12</sub> (LLZO) target using pulsed laser deposition. The effects of substrate temperatures and impurities on electrochemical properties of the films were investigated. The thin films of Li{\textendash}La{\textendash}Zr{\textendash}O were deposited at room temperature and higher temperatures on a variety of substrates. Deposition above 600 {\textdegree}C resulted in a mixture of cubic and tetragonal phases of LLZO, as well as a La<sub>2</sub>Zr<sub>2</sub>O<sub>7</sub> impurity, and resulted in aluminum enrichment at the surface when Al-containing substrates were used. Films deposited at 600 {\textdegree}C exhibited the highest room temperature conductivity, 1.61 {\texttimes} 10<sup>- 6</sup> S/cm. The chemical stability toward metallic lithium was also studied using X-ray photoelectron spectroscopy, which showed that the oxidation state of zirconium remained at + 4 following physical contact with heated lithium metal.</p>},
  year = {2015},
  booktitle = {Thin Solid Films},
  journal = {Thin Solid Films},
  series = {Thin Solid Films},
  volume = {576},
  pages = {55-60},
  month = {02/2015},
  doi = {10.1016/j.tsf.2014.11.019},
  language = {eng},
}