@article{6459,
  author = {Suhan Kim and Gao Liu and Andrew M Minor},
  title = {FIB Sample Preparation of Polymer Thin Films on Hard Substrates Using the Shadow-FIB method},
  year = {2009},
  booktitle = {Microscopy Today},
  journal = {Microscopy Today},
  series = {Microscopy Today},
  volume = {17},
  number = {06},
  pages = {20-23},
  month = {11/2009},
  language = {eng},
}