@inproceedings{26963,
  author = {Richard E Russo and Alexander A Bol'shakov and Jong-Hyun Yoo and Jhanis J Gonzalez},
  title = {Laser ablation plasmas for diagnostics of structured electronic and optical materials during or after laser processing},
  year = {2012},
  journal = {Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII},
  volume = {8243},
  pages = {82430A-1},
  month = {02/2012},
  address = {San Francisco, CA},
  doi = {10.1117/12.909548},
  language = {eng},
}