@article{26704,
  author = {André Anders and Jiří Čapek and Matêj Hála and Ludvik Martinu},
  title = {The ‘recycling trap’: a generalized explanation of discharge runaway in high-power impulse magnetron sputtering},
  abstract = {<p>Contrary to paradigm, magnetron discharge runaway cannot always be related to self-sputtering. We report here that the high density discharge can be observed with all conducting targets, including low sputter yield materials such as carbon. Runaway to a high density discharge is therefore generally based on self-sputtering in conjunction with the recycling of gas atoms in the magnetic field-affected pre-sheath. A generalized runaway condition can be formulated, offering a pathway to a time-dependent model for high-power impulse magnetron sputtering that includes rarefaction and an explanation for the termination of runaway.</p>},
  year = {2012},
  journal = {Journal of Physics D: Applied Physics},
  volume = {45},
  pages = {012003},
  month = {01/2012},
  issn = {0022-3727},
  doi = {10.1088/0022-3727/45/1/012003},
}