@article{14574, keywords = {Efficiency, Experimental, Ablation, Laser, Laser ablation, Laser ablation, Ablation efficiency, Plasma, Femtosecond, Nanosecond, Laser-induced plasma, Laser-induced plasma, Nanosecond laser, Silicon, Expansion}, author = {Xianzhong Zeng and Xianglei Mao and Ralph Greif and Richard E Russo}, title = {Experimental investigation of ablation efficiency and laser-induced plasma expansion during femtosecond and nanosecond laser ablation of silicon}, year = {2004}, booktitle = {Applied Physics A: Materials science and processing}, journal = {Applied Physics A: Materials science and processing}, series = {Applied Physics A: Materials science and processing}, volume = {80}, pages = {237-241}, note = {

LBNL-55783 NOT IN FILE

}, language = {eng}, }