@article{25348, keywords = {Temperature, Measurement, Film, Films, Thin, Laser, Excimer, Excimer laser, Semiconductor, Excimer laser}, author = {Xianfan Xu and Costas P Grigoropoulos and Richard E Russo}, title = {Transient temperature measurement during pulsed excimer laser heating of thin semiconductor films}, year = {1995}, journal = {Journal of Heat and Mass Transfer}, volume = {117}, pages = {17-24}, note = {

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}, language = {eng}, }