@article{14466, keywords = {Deposition, Pulse, Thin films, Film, Films, Thin, Thin film, Thin-film, Thin films, Laser, Pulse laser, Laser deposition}, author = {Richard E Russo and Samuel S Mao and Dale L Perry}, title = {Pulse laser deposition of thin films}, year = {1994}, booktitle = {Chemtech}, journal = {Chemtech}, series = {Chemtech}, volume = {24}, pages = {14-18}, note = {

NOT IN FILE

}, language = {eng}, }