@article{14441,
  keywords = {Deposition, Pulsed laser deposition, Laser, Ybacuo, Layers, Structure, Pulsed laser, Pulsed laser, Layer, Dielectric, Laser deposition, Pulsed laser deposition, Amorphous, Multichip modules},
  author = {Ronald P Reade and Paul H Berdahl and Leonard W Schaper and Richard E Russo},
  title = {Y-Ba-Cu-O multilayer structures with amorphous dielectric layers for multichip modules using ion-assisted pulsed laser deposition},
  abstract = {<p>Existing technology to construct high-temperature superconductor(HTSC) multichip modules (MCM{\textquoteright}s) incorporating several YBa<sub>2</sub>Cu<sub>3</sub>O<sub>7-δ</sub>(YBCO)thin films and thick dielectric layers are based on epitaxial growth of all layers from the template of a single-crystal substrate. This work demonstrates an alternate method to fabricate these structures: the use of a biaxially aligned yttria-stabilized zirconia (YSZ) intermediate layer deposited by ion-assisted pulsed-laser deposition. Using this technique, a YBCO thin film with <em>T</em> <sub> <em>c</em> </sub>\~{}87 K and <em>J</em> <sub> <em>c</em> </sub>\~{}3{\texttimes}10<sup>5</sup> A/cm<sup>2</sup> was grown on a 5 μm amorphous SiO<sub>2</sub> layer. In addition, YBCO/YSZ/SiO<sub>2</sub>/YSZ/YBCO/CeO<sub>2</sub>/YSZ and YBCO/YSZ/amorphous-YSZ/YBCO/CeO<sub>2</sub>/YBCO multilayer structures were constructed.</p>},
  year = {1995},
  booktitle = {Applied Physics Letters},
  journal = {Applied Physics Letters},
  series = {Applied Physics Letters},
  volume = {66},
  pages = {2001-2003},
  doi = {10.1063/1.114285},
  note = {<p>LBNL-36910 NOT IN FILE</p>},
  language = {eng},
}