@article{25186, keywords = {Laser ablation, Crater, Electron number density, Plasma temperature, Laser induced plasma spectroscopy}, author = {Haichen Liu and Xianglei Mao and Jong-Hyun Yoo and Richard E Russo}, title = {Early phase laser induced plasma diagnostics and mass removal during single-pulse laser ablation of silicon}, abstract = {
The electron number density and temperature during the early phase (<300 ns) of laser-induced plasmas from silicon using a 266-nm, 3-ns Nd:YAG laser were deduced via spectroscopic methods. These parameters were measured as a function of delay time vs. irradiance in the range of 2–80 GW/cm2, and compared with crater volume measurements. A dramatic change in plasma characteristics (electron number density, temperature, and degree of ionization) as well as a sharp increase of mass removal was observed when the irradiance was increased beyond a threshold of 20 GW/cm2. Possible mechanisms such as inverse bremsstrahlung and self-regulation were used to describe these data in the low irradiance region. Laser self-focusing and critical temperature are discussed to explain the dramatic changes after the irradiance reaches the threshold.
}, year = {1999}, journal = {Spectrochimica Acta Part B: Atomic Spectroscopy}, volume = {54}, pages = {1607-1624}, month = {11/1999}, doi = {10.1016/S0584-8547(99)00092-0}, language = {eng}, }