@article{25040, keywords = {Film, Films, Laser, Superconducting, Superconducting films, Vaporization, Y-ba-cu-o, Ybacuo}, author = {Mehdi Balooch and Donald R Olander and Richard E Russo}, title = {Y-Ba-Cu-O superconducting films produced by long-pulse laser vaporization}, abstract = {
Deposition of superconducting thin films from YBa2Cu3O7 targets using a long‐pulse (ms) Nd‐glass laser with 50 J/pulse energy has been demonstrated. The deposition rate was approximately 100 nm/pulse and the film stoichiometry was close to that of the target. Scanning electron microscopy revealed spherical inclusions in the film. Scanning tunneling microscopy in air showed a terrace‐ledge structure on the uniform portion of the film. A film produced by four pulses on a SrTiO3 substrate, held at 540 °C, and post‐annealed in O2 at 850 °C for about 2h exhibited an onset transition at 78 K and zero resistance at 61 K. This new approach can provide fast deposition rates and broad‐area film coverage per laser shot.
}, year = {1989}, journal = {Applied Physics Letters}, volume = {55}, pages = {197}, doi = {10.1063/1.102405}, note = {NOT IN FILE
}, language = {eng}, }