@misc{24330, author = {Paul A Mathew and Dale A Sartor and William F Tschudi}, title = {Self-benchmarking Guide for Cleanrooms: Metrics, Benchmarks, Actions}, abstract = {

This guide is primarily intended for personnel who have responsibility for managing energy use in existing facilities - including facilities managers, energy managers, and their engineering consultants. Additionally, cleanroom planners and designers may also use the metrics and benchmarks described in this guide for goal-setting in new construction or major renovation.

}, year = {2009}, language = {eng}, }