@article{23860,
  author = {Joakim Andersson and Arutiun P Ehiasarian and André Anders},
  title = {Observation of Ti4+ ions in a high power impulse magnetron sputtering plasma},
  abstract = {<p>Multiply charged titanium ions including Ti<sup>4+</sup> were observed in high power impulse magnetron sputtering discharges. Mass/charge spectrometry was used to identify metal ion species. Quadruply charged titanium ions were identified by isotope-induced broadening at mass/charge 12. Due to their high potential energy, Ti<sup>4+</sup> ions give a high yield of secondary electrons, which in turn are likely to be responsible for the generation of multiply charged states.</p>},
  year = {2008},
  journal = {Applied Physics Letters},
  volume = {93},
  pages = {71504},
  month = {08/2008},
  doi = {10.1063/1.2973179},
  language = {eng},
}