@article{12123, author = {Joakim Andersson and Arutiun P Ehiasarian and Andr{\'e} Anders}, title = {Observation of Ti4+ ions in a high power impulse magnetron sputtering plasma}, abstract = {
Multiply charged titanium ions including Ti4+ were observed in high power impulse magnetron sputtering discharges. Mass/charge spectrometry was used to identify metal ion species. Quadruply charged titanium ions were identified by isotope-induced broadening at mass/charge 12. Due to their high potential energy, Ti4+ ions give a high yield of secondary electrons, which in turn are likely to be responsible for the generation of multiply charged states.
}, year = {2008}, booktitle = {Applied Physics Letters}, journal = {Applied Physics Letters}, series = {Applied Physics Letters}, volume = {93}, pages = {71504}, month = {08/2008}, doi = {10.1063/1.2973179}, language = {eng}, }