@article{23679,
  keywords = {Constricted plasma source, Gas plasma flow, Plasma diagnostics, Plasma processing of materials},
  author = {André Anders and Robert A MacGill and Michael D Rubin},
  title = {Evaluation of the Plasma Distribution of a Quasi-Linear Constricted Plasma Source},
  abstract = {<p>The quasi-linear constricted plasma source is a downstream plasma source with ten linearly aligned discharge cells. Each cell operates on the basis of a constricted glow discharge. The plasma output can easily be monitored by the plasma-emitted light. The information is not only intuitive but can also be used to operate on-line feedback control of the plasma source which is important for large-area plasma processing of materials.</p>},
  year = {1999},
  journal = {IEEE Transactions on Plasma Science},
  volume = {27},
  number = {1},
  pages = {82-83},
  month = {02/1999},
  language = {eng},
}