@inproceedings{23564, author = {Jennifer T Ross and Michael D Rubin and Ture K Gustafson}, title = {Crystalline Growth of Wurtzite GAN on (111) GaAs}, abstract = {
Gallium Nitride films were grown on (111) Gallium Arsenide substrates using reactive rf magnetron sputtering. Despite a 20% lattice mismatch and different crystal structure, wurtzite GaN films grew epitaxially in basal orientation on (111) GaAs substrates. Heteroepitaxy was observed for growth temperatures between 550-600°C. X-ray diffraction patterns revealed (0002) GaN peak with a full-width-half-maximum (FWHM) as narrow as 0.17°. Possible surface reconstructions to explain the epitaxial growth are presented.
}, year = {1992}, journal = {Materials Research Society Symposium}, volume = {242}, pages = {457}, doi = {10.1557/PROC-242-457}, language = {eng}, }